JPH03101853U - - Google Patents

Info

Publication number
JPH03101853U
JPH03101853U JP1003790U JP1003790U JPH03101853U JP H03101853 U JPH03101853 U JP H03101853U JP 1003790 U JP1003790 U JP 1003790U JP 1003790 U JP1003790 U JP 1003790U JP H03101853 U JPH03101853 U JP H03101853U
Authority
JP
Japan
Prior art keywords
electron beam
slit
slit plate
detection result
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1003790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1003790U priority Critical patent/JPH03101853U/ja
Publication of JPH03101853U publication Critical patent/JPH03101853U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1003790U 1990-02-02 1990-02-02 Pending JPH03101853U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1003790U JPH03101853U (en]) 1990-02-02 1990-02-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1003790U JPH03101853U (en]) 1990-02-02 1990-02-02

Publications (1)

Publication Number Publication Date
JPH03101853U true JPH03101853U (en]) 1991-10-23

Family

ID=31513637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1003790U Pending JPH03101853U (en]) 1990-02-02 1990-02-02

Country Status (1)

Country Link
JP (1) JPH03101853U (en])

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